Laser device for cleaning of carbon deposit, which is the wafer roasting residue.

Manual cleaning didn’t provide good repeatability of the process. It was also dangerous, due to laser beam used. Another problem was a carbon dust, that could affect machine (especially the linear drives) during the process.

All the problems above are solved with a drylin E gantry, similar to DLE-FG-0006 type. The process is now repeatable, sage for operators and the gantry is dust resistant and maintenance-free.
As the D1 motor controllers were used as well, the programming and communication with the master controller is simpla and based on the DI/O in binary mode.

Systemy sterowania silnikiem drylin® E

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